ASTM E2090-2006 利用光电子显微镜和扫描电子显微镜对清洁室擦刷工具释放粒子和纤维的尺寸差异计数用标准试验方法

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【英文标准名称】:StandardTestMethodforSize-DifferentiatedCountingofParticlesandFibersReleasedfromCleanroomWipersUsingOpticalandScanningElectronMicroscopy
【原文标准名称】:利用光电子显微镜和扫描电子显微镜对清洁室擦刷工具释放粒子和纤维的尺寸差异计数用标准试验方法
【标准号】:ASTME2090-2006
【标准状态】:现行
【国别】:
【发布日期】:2006
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:E21.05
【标准类型】:(TestMethod)
【标准水平】:()
【中文主题词】:无菌室;计数;电子显微镜;电子;纤维;显微术;光学的;颗粒;释放;扫描;尺寸;试验方法;试验
【英文主题词】:cleanroomwipers;contaminationcontrol;membranefilter;opticalmicroscopy;particlecountingandsizing;particlesandfibers;scanningelectronmicroscopy
【摘要】:Thistestmethodprovidesforaccurateandreproducibleenumerationofparticlesandfibersreleasedfromawiperimmersedinacleaningsolutionwithmoderatemechanicalstressapplied.Whenperformedcorrectly,thiscountingtestmethodissensitiveenoughtoquantifyverylowlevelsoftotalparticleandfiberburden.Theresultsareaccurateandnotinfluencedbyartifactorparticlesizelimitations.AfurtheradvantagetothistechniqueisthatitallowsformorphologicalaswellasX-rayanalysisofindividualparticles.1.1Thistestmethodcoverstestingallwipersusedincleanroomsandothercontrolledenvironmentsforcharacteristicsrelatedtoparticulatecleanliness.1.2Thistestmethodincludestheuseofcomputer-basedimageanalysisandcountinghardwareandsoftwareforthecountingofdenselyparticle-ladenfilters(see).Whiletheuseofthisequipmentisnotabsolutelynecessary,itisstronglyrecommendedtoenhancetheaccuracy,speed,andconsistencyofcounting.1.3ThevaluesstatedinSIunitsaretoberegardedasthestandard.Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:C47;C62
【国际标准分类号】:13_040_35
【页数】:11P.;A4
【正文语种】: